X-eye SF160 Series
2D & 3D Micro CT System
- Non-destructive analysis of semiconductor, SMT, and electron/electric components
- Hybrid Tube Option (160kv/500㎛, 10,000hrs/filament)
- Dual CT – High-quality CT image / high speed scan
Best performance X-ray Inspection System
High-performance Micro-focus Open Tube with 160kV is installed and fine defects of 1㎛ are detectable.
High-resolution X-ray image can be gained with world best magnification by installing high-price Open Tube as standard.
Dual CT function can be purchased additionally, and exact location & size of defects can be detected and analyzed with this function.
X-ray Tube | 160 kV / 200 µA (option 160 kV / 500 µA) |
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Min. Resolution | 0.9 µm |
Table Size | 460 X 510 mm (option 550 X 650 mm) |
AXIS | X, Y, Z, Tilt (70º), R, Y-aft, Cone beam R |
Detector | 5 inch Pixel FPD |
CT Scan Method | Oblique CT / Cone beam CT |
Foot print | 1,340mm x 1,460mm x 1,670mm |
Weight | 2,000kg |