US-Blow Cleaner
Ultrasonic dry cleaner
- This is a dry cleaner device that removes foreign matter efficiently by lifting up and removing the foreign matter with ultrasonic air
- This equipment removes foreign matters on FPD, etc. byusing ultrasonic air without contact
- 1.6 μm particle can be removed 100% by dry cleaner. Since the dry cleaning method is introduced, any water, chemicals, etc. are not required. Cleaning on one side or both sides is possible.
Removal capability of ultrasonic dry cleaner
Example of removing 3μm fine particles (100% removed after treatment)
- Blow 20-30kHz ultrasonic air
- Make foreign objects resonate and float from the workpiece
- Suck the floating foreign objects in vacuum
- Removal rate of fine particles of 10μm or less exceeds 99%
| Item | Specification |
|---|---|
| Stage size | Correspond to up to 10th generation |
| Stage material | Correspond to various materials (ceramic) |
| Thrust up pin material | Correspond to various materials |
| Thrust up pin drive method | Pulse motor of cam mechanism |
| Thrust up stroke | From 50 mm to 105 mm (fixed) |
| Vacuum pad | Φ 15 mm made by VITON |
| Stage drive | Ball screw + AC servo motor |
| Stage speed | From 5 to 600 mm / sec |
| Setting method | Digital setting in operation panel |
| Cleaner head | Selectable |
| Head width | Effective length + α |
| Substrate thickness measurement | Installed |
| VCR | Option |
| Alignment mechanism | Option |
| Static electricity measure | Option |
LCD
Glass cleaning in the LCD manufacturing process
Wet cleaning
Pre-cleaning before wet cleaning
Glass and film
Cleaning glass and film before and after process in touch panel manufacturing process
Photovoltaic panels
Cleaning applications for photovoltaic panels
General operations
Removing foreign matter in general operations (for example, removal of foreign matter from roll-to-roll packaging film)